Integrated NanoMaterials Laboratory Equipment
As/Sb-MBE systemDescription: The As/Sb -MBE is designed for providing (In, Ga, Al) / (As, Sb) semiconductor wafer epitaxy services
- VEECO GEN-930 MBE
- In, Ga, Al SUMO cells for group III
- Valved crackers for As and Sb cells
- Si, Te and Be cells for doping
- Up to 3″ diameter wafer holder
- Growth control — MOLLY
- 200 a.mu. RGA
- Optical pyrometer (440ºC – 800°C)
- RHEED for real time in-situmonitoring and KSA400 software for image/video capture for surface analysis
