Integrated NanoMaterials Laboratory Equipment

As/Sb-MBE system

 Description: The As/Sb -MBE is designed for providing (In, Ga, Al) / (As, Sb) semiconductor wafer epitaxy services

  • In, Ga, Al SUMO cells for group III
  • Valved crackers for As and Sb cells
  • Si, Te and Be cells for doping
  • Up to 3″ diameter wafer holder
  • Growth control — MOLLY
  • 200 RGA
  • Optical pyrometer (440ºC – 800°C)
  • RHEED for real time in-situmonitoring and KSA400 software for image/video capture for surface analysis