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Integrated NanoMaterials Laboratory

Nanomaterials and nanostructures grown in INML are used in lasers, solar cells, detectors, transistors, modulators, and a wide range of other electronic and photonic devices.
The CNSI is open for researchers conducting approved Phase 2 research in accordance with guidelines for ramping up UCLA research.
Special notice: For important updates about COVID-19 and its impact on CNSI facilities, please visit our Coronavirus guidance page.

Molecular Beam Epitaxy

Integrated NanoMaterials Laboratory

The Integrated Nanomaterials Laboratory (INML) is a state-of-the-art nanomaterials synthesis and characterization facility. INML addresses the critical technological needs of the future through material development as we integrate nanoscience with disciplines such as electronics, photonics, renewable energy, chemistry, biology, and physics. the extensive technological advances made by the INML particularly in the areas of integrated iii-Sb/CMOS optoelectronics, infra- red photonics, and electronics form the basis of a large number of our on-going partnerships and collaborations.

Services:


Featuring two interconnected Veeco GEN -930 MBE systems, the INML is equipped with the material synthesis and growth-monitoring tools necessary to fabricate a wide range of III-V and III-N compound semiconductor nanostructures.

Center Highlights

  • Semiconductor nanomaterials synthesis & characterization facility
  • -III-As/Sb and III -N MBE epitaxial growth foundry services
  • High quality alloys for electronic / photonic devices
  • Integration of dissimilar materials for novel applications
  • Work closely with ISNC cleanroom and NPC at CNSI

    III-N chamber

  • N plasma source with RF generator
  • Fully automated N gas delivery system
  • High T substrate heater - 1200 degree celsius
  • Emissivity correcting optical pyrometer
  • Up to 3" diameter wafers
  • RHEED for real-time in-situ monitoring

    III-As/Sb chamber

  • Group III: In, Ga, Al effusion cells
  • Automated As and Sb valved crackers
  • Dopants: Si, Te, and Be cells
  • RHEED for real-time in-situ monitoring
  • KSA400 software for image/video analysis
  • Automated growth control - Molly

Semiconductor Epitaxy

Services:


Featuring two interconnected Veeco GEN -930 MBE systems, the INML is equipped with the material synthesis and growth-monitoring tools necessary to fabricate a wide range of III-V and III-N compound semiconductor nanostructures.

Center Highlights

  • Semiconductor nanomaterials synthesis & characterization facility
  • -III-As/Sb and III -N MBE epitaxial growth foundry services
  • High quality alloys for electronic / photonic devices
  • Integration of dissimilar materials for novel applications
  • Work closely with ISNC cleanroom and NPC at CNSI

Services:


Featuring two interconnected Veeco GEN -930 MBE systems, the INML is equipped with the material synthesis and growth-monitoring tools necessary to fabricate a wide range of III-V and III-N compound semiconductor nanostructures.

III-As/Sb chamber

  • Group III: In, Ga, Al effusion cells
  • Automated As and Sb valved crackers
  • Dopants: Si, Te, and Be cells
  • RHEED for real-time in-situ monitoring
  • KSA400 software for image/video analysis
  • Automated growth control - Molly
  • III-N chamber

  • N plasma source with RF generator
  • Fully automated N gas delivery system
  • High T substrate heater - 1200 degree celsius
  • Emissivity correcting optical pyrometer
  • Up to 3" diameter wafers
  • RHEED for real-time in-situ monitoring